| May 1971 |
 |
Established SpeedFam Co., Ltd. as 50:50 joint venture with SpeedFam Corp. (USA) and Obara Metal Works Co., Ltd. (Japan) |
| January 1972 |
|
Began production / sale of single side polisher / lapper |
| June 1978 |
|
Began production / sale of double side polisher / lapper |
| January 1984 |
|
Established SpeedFam Clean System Co., Ltd. as production and sales group of cleaning machines |
| May 1984 |
|
Established sales and service group in Korea |
| October 1984 |
|
Established production and sales group in India |
| July 1985 |
|
Established sales group in Sendai, Japan |
| April 1986 |
|
Established sales group in Osaka, Japan |
| February 1987 |
|
Established production and sales group in Taiwan |
| June 1988 |
|
Began production and sales of edge polisher |
| May 1989 |
|
Established sales and service group in Singapore |
| July 2000 |
|
Began production and sales of DCP (dry planarization system) |
| September 2000 |
|
Dissolved joint venture to become a 100% investment subsidiary of Obara Corp. |
| September 2001 |
|
Established production and sales group in China |
| July 2004 |
|
Established sales and service group in U.S.A. |
| July 2004 |
|
Established sales and service group in Europe |
| October 2009 |
|
Began production and sales of laser equipment by division transfer from Obara Corp. |
| September 2011 |
|
Began production and sales of edge grinder by acquisition of Yuhi Technology Corp. |
