FAM (Free Abrasive Machining) is the SpeedFam original single side lap process, which enables high efficiency by free-moving abrasives on a ultrahard plate. These simple systems are extremely easy to operate and maintain. Not only applicable for lapping, we offer this lineup in configurations for soft and "hard" polishing as well. From bare silicon wafers to metals and sapphire, these single side systems offer abrasive processes to a broad range of production requirements.
PAGE   BACK | NEXT
Equipment for bare silicon wafers
FAM59SPAW / FAM50SPAW
SpeedFam's 50-SPAW and 59-SPAW machines are automated single side mechanochemical polishing systems for bare silicon wafer processing. We transport ceramic mounting plates (loaded and unloaded with wafers) automatically. These systems are equipped with various advanced technologies such as a low thermal expansion polishing plates and cooling jackets, independent forced drive and precision pressure control for each process carrier.
Equipment for all purposes
FAM48BAW / SPAW
Our 48 inch platen machines are general-purpose single side abrasive systems applicable to a wide variety of processes for mass-production. Configurations include lap, polish and hard polish specifications and all can incorporate corrosion resistant materials and various application specific options.
FAM32BTAW / GPAW
The SpeedFam line up of 32 inch general-purpose single side machines offers a wide variety of specifications for numerous applications. This equipment is applicable for a wide variety of processes for mass production. Configurations include lap, polish and hard polish specifications. All can incorporate corrosion resistant materials for a variety of specific applications and are available with a wide assortment of options to meet your requirements.
Our 12B is a table top single side abrasive tool with a plate diameter of 12 inches. From the mass production of a small components to experimental projects this can be widley used for lap, polish and hard polish applications.
Our SP-1700 is an oscillation type single side polisher with a 1700mm diameter polishing plate. This is a mass production tool used in the polish of LCD glass substrates (typically 730mmx920mm square). The SP series polishers are configurable to other large workpieces dimensions as well.