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12 April 2000
Release of double side lapper, polisher DSM22B-6L/P for glass disks
- DSM22B-6L/P is a new product of SpeedFam which is a double side processing machine with six workpiece carriers (jigs to hold processing workpiece in place) each with a diameter of 22 inches. This machine is specifically designed for thin and fragile glass workpieces and is adopted for production of small glass memory disks.
- This machine is capable of batch processes of 108 pieces of each (3.5"), 130 pieces (3"), and 180 pieces (2.5"). The micro-waviness is equal to or less than 0.4nm. The 22B-6L/P is available as either a lapper or polisher with the quality to process thin glass workpieces to demanding industry requirements.
- Magnetic disk density is increasing nearly 100% a year, and the substrate specification requirements are getting tighter. These days glass material are selected more for the substrates.
- One of the answers to maintaining low costs for glass disks processing (time and cost) hangs in the DSM22B-6L/P. The superior mass production characteristics of this system for high precision processing can be realized to meet the needs of the glass disk industry.
Features
- Super exact flat processing of glass disk substrates
- Applicable for all planar processing from lap to final polish
- Options to enable various functions for glass disk manufacturing
- High precision auto thickness controls (choicees include eddy current sensor or magnescale method)
- Machine is applicable to other applications: silicon wafers, crystals, aluminum disks, etc.
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