- 02 OCT 2023 SEMICON Japan 2023 (Tokyo Big Sight)
- 07 OCT 2022 SEMICON Japan 2022 (Tokyo Big Sight)
- 04 OCT 2021 SEMICON Japan 2021 (Tokyo Big Sight)
- 02 OCT 2020 SEMICON Japan 2020 Virtual
- 04 OCT 2019 SEMICON Japan 2019 (Tokyo Big Sight)
- 01 NOV 2018 SEMICON Japan 2018 (Tokyo Big Sight)
- 08 AUG 2018 IMTS 2018 (McCormick Place)
- 29 JUN 2018 Relocation of Singapore Office
- 17 MAR 2018 Japan Welding Show 2018 (Tokyo Big Sight)
- 18 NOV 2017 SEMICON Japan 2017 (Tokyo Big Sight)
- 06 JAN 2017 New location of Japan operation
- 09 NOV 2016 SEMICON Japan 2016 (Tokyo Big Sight)
- 12 SEP 2016 President appointment at SpeedFam
- 02 JUL 2016 IMTS 2016 (McCormick Place)
- 04 OCT 2015 SEMICON Japan 2015 (Tokyo Big Sight)
- 10 SEP 2015 Business reorganization between group companies
- 16 JUL 2015 EMO MILANO 2015 (Fieramilano)
- 09 NOV 2014 SEMICON Japan 2014 (Tokyo Big Sight)
- 11 JUL 2014 IMTS 2014 (McCormick Place)
- 13 JUN 2014 Acquisition of Melchiorre
- 02 FEB 2014 Japan Welding Show 2014 (Tokyo Big Sight)
- 04 OCT 2013 SEMICON Japan 2013 (Makuhari Messe)
- 15 AUG 2013 METALEX 2013 (BITEC Bangkok)
- 02 OCT 2012 SEMICON Japan 2012 (Makuhari Messe)
- 08 DEC 2011 LIGHTING JAPAN 2012 (Tokyo Big Sight)
- 01 NOV 2011 SEMICON Japan 2011 (Makuhari Messe)
- 02 OCT 2011 Acquisition of Yuhi Technology
- 07 APR 2011 Release of pulse YAG laser equipment of 600W
- 14 MAR 2011 SpeedFam operations after the Pacific coast of Tohoku Earthquake
- 02 FEB 2011 PV EXPO 2011 (Tokyo Big Sight)
- 18 OCT 2010 SEMICON Japan 2010 (Makuhari Messe)
- 15 AUG 2010 Opening of U.S. Facility in Buffalo Grove, Illinois
- 30 JUN 2010 IMTS 2010 (McCormick Place)
- 05 APR 2010 Japan Welding Show 2010 (Tokyo Big Sight)
- 11 FEB 2010 BATTERY JAPAN (Tokyo Big Sight)
- 15 SEP 2009 Laser division transferred to SpeedFam
- 01 SEP 2009 New President of SpeedFam
- 15 AUG 2009 SEMICON Japan 2009 (Makuhari Messe)
- 06 JAN 2009 FC EXPO 2009 (Tokyo Big Sight)
- 08 SEP 2008 Subsidiary name change
- 15 AUG 2008 SEMICON Japan 2008 (Makuhari Messe)
- 14 SEP 2007 SEMICON Japan 2007 (Makuhari Messe)
- 15 AUG 2007 SEMICON Europa 2007 (Stuttgart)
- 09 APR 2007 Subsidiary establishment in Korea
- 15 AUG 2006 SEMICON Japan 2006 (Makuhari Messe)
- 25 MAY 2006 IMTS 2006 (McCormick Place)
- 01 MAR 2006 Increase of polisher production capacity
- 25 DEC 2005 Increase of precision cleaner production capacity
- 01 NOV 2005 Opening of Shenzen Service Station
- 15 AUG 2005 SEMICON Japan 2005 (Makuhari Messe)
- 04 JUL 2005 An introduction of double side polisher for 300mm, 200mm silicon wafers
- 30 JUN 2005 Flat Chaser to efficiently measure flatness of lapping plates and polishing pads
- 27 JUN 2005 An introduction to double side lapper of 300mm silicon wafers
- 01 SEP 2004 Cancellation of European and American sales agency contract
- 25 OCT 2002 Edge Polisher introduction to patterned/device wafer applications
- 07 SEP 2000 Guidance of new life SpeedFam
- 12 APR 2000 Release of double side lapper/polisher DSM22B-6L/P for glass disks