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27 June 2005
An introduction to double side lapper of 300mm silicon wafers
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- It is still necessary to double side lap silicon wafers to achieve required nanotopography. The SpeedFam DSM28B-5L-4D is a 4-way motion, 4-motor drive machine for efficient mass production. Batch sizes are 15 pieces each for 300mm wafers. Furthermore, it is the stability of this mass production system which makes it the most suitable for the quality processing. SpeedFam has taken the latest developments in functions such as GUI operation panel, eddy current automatic thickness control (end point), and our Direct Read Process system.
Total process control, efficiency and support are optimized by the design of our accompanying machined components, consumables and service. 
Double Side Lapper
DSM28B-5L-4D
- It is still necessary to double side lap silicon wafers to achieve required nanotopography. The SpeedFam DSM28B-5L-4D is a 4-way motion, 4-motor drive machine for efficient mass production. Batch sizes are 15 pieces each for 300mm wafers. Furthermore, it is the stability of this mass production system which makes it the most suitable for the quality processing. SpeedFam has taken the latest developments in functions such as GUI operation panel, eddy current automatic thickness control (end point), and our Direct Read Process system.
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