02.11.10 BATTERY JAPAN (Tokyo Big Sight)
09.15.09 Laser division transferred to SpeedFam
09.01.09 New President of SpeedFam
08.15.09 SEMICON Japan 2009 (Makuhari Messe)
01.06.09 FC EXPO 2009 (Tokyo Big Sight)
04.09.07 Subsidiary establishment in Korea
12.25.05 Increase of precision cleaner production capacity
04.12.00 Release of double side lapper/polisher DSM22B-6L/P for glass disks
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