Edge Profiler

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Edge Profiler

Edge Profiler is a profile metrology system of substrate edge area, which performs measurement of edge and notch by single machine. Various kinds of material can be measured from diameter 2" to 12" including transparent substrates such as quartz crystal. Edge Profiler enables improvement of quality and yield management at edge grinding process.

EPRO-212
EPRO-212
  1. Edge and notch profile can be measured by one machine
  2. For 2" to 12" substrates by interchange of edge measuring lens
  3. Substrate thickness: 1.6 mm maximum
  4. Measured image is saved as bitmap file, which can easily be utilized in PC
  5. Measurement data is saved as text file (CSV format)
  6. (OPTION) Network connection between Edge Profiler and multiple Edge Grinders
  7. (OPTION) Measurement of orientation flat, substrate diameter, etc.

Edge Profile image

Notch Profile image

(OPTION) Edge template measurement

With preset of qualification area, Edge Profiler qualifies edge ground substrate.

Model

Function Product Name
Edge Profile EPRO-212E
Notch Profile EPRO-212N
Edge and Notch Profile EPRO-212EN
Edge Profile and Visual Monitor EPRO-212EV

EPRO-212EV enables observation of edge chipping by color monitor in addition to profile measurement of substrate edge.

U-ED-208ZA/U-ED-208
U-ED-208ZA/U-ED-208
  1. Edge and notch profile, and diameter can be measured by one machine. U-ED-208ZA is full automation model while U-ED-208Z is manual operation model.
  2. For 2" to 8" substrates without interchange of edge measuring lens
  3. Substrate thinness: 3 mm maximum
  4. Measured image is saved as bitmap file, which can easily be utilized in PC
  5. Measurement data is saved as text file (CSV format)

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